Designing, realization and characterization of a novel capacitive pressure/flow sensor

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 151-154

  Oosterbroek, R E ^a   Lammerink, T S J ^a   Berenschot, J W ^a   van den Berg, A ^a   Elwenspoek, M C ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; FLOW MEASUREMENT; MICROELECTROMECHANICAL DEVICES; MICROMACHINING;

INTEGRATED PRESSURE/FLOW SENSORS;

PRESSURE TRANSDUCERS;

EID: 0030720589     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)