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Surface and Coatings Technology

Volumn 193, Issue 1-3 SPEC. ISS., 2005, Pages 219-222

Characterization of Zr-Al-N films synthesized by a magnetron sputtering method

(5) Makino, Y a Mori, M a Miyake, S a Saito, K b Asami, K b

a OSAKA UNIVERSITY (Japan)

b TOHOKU UNIVERSITY (Japan)

Author keywords

Band parameters; Hardness; Phase change; Zr Al N system

Indexed keywords

FOURIER TRANSFORM INFRARED SPECTROSCOPY; MAGNETRON SPUTTERING; MICROHARDNESS; X RAY DIFFRACTION ANALYSIS; ZIRCONIUM;

BAND PARAMETERS; INDUCTIVELY COMBINED RF-PLASMA-ASSISTED MAGNETRON SPUTTERING; PHASE CHANGE; T (TRANSITION METAL)-AL-N PSEUDOBINARY SYSTEM;

THIN FILMS;

PHASE CHANGE;

EID: 13844298817 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2004.07.036 Document Type: Article

Times cited : (46)

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