Effect of plasma nonuniformity on electron energy distribution in a dusty plasma

Journal of Physics D: Applied Physics

Volumn 38, Issue 3, 2005, Pages 403-408

  Denysenko, I ^a,c   Yu, M Y ^a   Xu, S ^b  

^a RUHR UNIVERSITY BOCHUM   (Germany)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^c V N KARAZIN KHARKIV NATIONAL UNIVERSITY   (Ukraine)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; ARGON; ELECTRIC SPACE CHARGE; ELECTRON ENERGY LEVELS; ELECTRON MOBILITY; HARMONIC ANALYSIS; HEATING; IONIZATION; MATHEMATICAL MODELS; NATURAL FREQUENCIES; PARAMETER ESTIMATION;

BOLTZMANN EQUATIONS; ELECTRON DIFFUSION; ELECTRON ENERGY DISTRIBUTION FUNCTIONS (EEDF); ENERGY-RELAXATION;

SEMICONDUCTOR PLASMAS;

EID: 13844254584     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/38/3/009     Document Type: Article

References (38)

1. Bouchoule A (ed) 1999 Dusty Plasmas: Physics, Chemistry, and Technological Impacts in Plasma Processing (New York: Wiley)
2. Boufendi L and Bouchoule A 2002 Plasma Sources Sci. Technol. 11 A211 and the references therein
3. Stoffels E, Stoffels W W, Kersten H, Swinkels G H P M and Kroesen G M W 2001 Phys. Scr. T 89 168 and the references therein
4. Vladimirov S V and Ostrikov K 2004 Phys. Rep. 393 175
5. Fridman A A, Boufendi L, Hbid T, Potapkin B V and Bouchoule A 1996 J. Appl. Phys. 79 1303
6. Kortshagen U and Bhandarkar U 1999 Phys. Rev. E 60 887
7. Ostrikov K, Denysenko I B, Vladimirov S V, Xu S, Sugai H and Yu M Y 2003 Phys. Rev. E 67 056408
8. Denysenko I B, Ostrikov K, Xu S, Yu M Y and Diong C H 2003 J. Appl. Phys. 94 6097
9. Kolobov V I and Godyak V A 1995 IEEE Trans. Plasma Sci. 23503
10. Turner M M and Lieberman M A 1999 Plasma Sources Sci. Technol. 8313
11. Lieberman M A and Lichtenberg A J 1994 Principles of Plasma Discharges and Materials Processing (New York: Wiley)
12. Tachibana K, Hayashi Y, Okuno T and Tatsuta T 1994 Plasma Sources Sci. Technol. 3314
13. McCaughey M J and Kushner M J 1991 J. Appl. Phys. 69 6952
14. Boeuf J P 1992 Phys. Rev. A 46 7910
15. Wang D and Dong J Q 1997 J. Appl. Phys. 81 38
16. Kortshagen U, Busch C and Tsendin L D 1996 Plasma Sources Sci. Technol. 5 1
17. Denysenko I, Yu M Y, Ostrikov K, Azarenkov N A and Stenflo L 2004 Phys. Plasmas 11 4959
18. Denysenko I, Yu M Y, Ostrikov K and Smolyakov A 2004 Phys. Rev. E 70 046403
19. Belenguer Ph, Blondeau J Ph, Boufendi L, Toogood M, Plain A, Bouchoule A, Laure C and Boeuf J P 1992 Phys. Rev. A 46 7923
20. Bouchoule A and Boufendi L 1993 Plasma Sources Sci. Technol. 2 204
21. Daugherty J E, Porteous R K, Kilgore M D and Graves D B 1992 J. Appl. Phys. 72 3934
22. Tsytovich V N, Morfill G E and Thomas H 2002 Plasma Phys. Rep. 28 623
23. Winkler R, Wilhelm J and Hess A 1985 Ann. Phys. (Leipz.) 42537
24. Winkler R, Capitelli M, Dilonardo M, Corse C and Wilhelm J 1986 Plasma Chem. Plasma Proc. 6 437
25. Shkarofsky I P, Johnston T W and Bachynski M P 1966 The Particle Kinetics of Plasmas (Reading, MA: Addison-Wesley)
26. Kortshagen U, Schlüter H and Shivarova A 1991 J. Phys. D: Appl. Phys. 24 1571 and the references therein
27. Ferreira C M and Loureiro J 2000 Plasma Sources Sci. Technol. 9 528
28. Mott-Smith H M and Langmuir I 1926 Phys. Rev. 28 727
29. Lochte-Holtgreven W 1968 Plasma Diagnostics (Amsterdam: North-Holland) p 675
30. Tichonov A N and Samarskii A A 1967 Partial Differential Equations of Mathematical Physics (San Francisco: Holden-Day)
31. Smolyakov A I, Godyak V and Tyshetskiy Y 2001 Phys. Plasmas 8 3857
32. Tachibana K and Hayashi Y 1996 Pure Appl. Chem. 68 1107
33. Gordiets B F and Ferreira C M 1999 J. Appl. Phys. 86 4118
34. Garscadden A, Ganguly B N, Haaland P D and Williams J 1994 Plasma Sources Sci. Technol. 3 239
35. Hayashi N 2001 Phys. Plasmas 8 3051
36. Birdsall C K and Langdon A B 1985 Plasma Physics Via Computer Simulation (New York: McGraw-Hill)
37. Ferreira C M, Gordiets B F and Tatarova E 2000 Plasma Phys. Control. Fusion 42 B165
38. Capitelli M, Ferreira C M, Gordiets B F and Osipov A I 2000 Plasma Kinetics in Atmospheric Gases (Berlin: Springer)