X-ray photoelectron spectroscopy of sputter-deposited fluorocarbon films

Journal of Materials Science Letters

Volumn 18, Issue 5, 1999, Pages 415-417

  Yamada, Y ^a   Kurobe, T ^a   Yagawa, K ^a   Ikeda, K ^a  

^a KANAZAWA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; COMPOSITION; ELECTRIC DISCHARGES; ETCHING; MOLECULAR STRUCTURE; PLASMA POLYMERIZATION; PYROLYSIS; SPUTTER DEPOSITION; TEMPERATURE; THICKNESS MEASUREMENT; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

LASER BEAM PROBE; SPUTTER CLEANING;

FLUOROCARBONS;

EID: 0033099063     PISSN: 02618028     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1006661507638     Document Type: Article

References (11)

1. H. BIEDERMANN, Vacuum 31 (1981) 285.
2. I. SUGIMTO and S. MIYAKE, Thin Solid Films 41 (1988) 51.
3. K. NAKAJIMA, A. T. BELL and M. SHEN, J. Appl. Polym. Sci. 23 (1979) 2627.
4. K. HOZUMI, K. KITAMURA and T. KITADE, Bull. Chem. Soc. Jpn. 54 (1981) 1392.
5. Y. IRIYAMA, T. YASUDA and D. L. CHO, J. Appl. Phys. Sci. 39 (1990) 249.
6. N. INAGAKI, S. TASAKA and K. MORI, J. Appl. Polym. Sci. 43 (1991) 581.
7. F. PONCIN-EPAILLARD, B. CHEVET and J. BROSSE, ibid. 52 (1994) 1047.
8. Y. YAMADA and T. KUROBE, Jpn. J. Appl. Phys. 32 (1993) 5090.
9. H. W. LEHMANN, K. FRICK, R. WIDER, J. L. VOSSEN and E. JAMES, Thin Solid Films 3 (1978) 231.
10. J. J. PIREAUX, J. P. DELUE, A. HECQ and J. P. DAUCHOR "Physicochemical aspects of polymer surfaces", edited by K. L. Mittal (Plenum Press, New York and London, 1983) p. 53.
11. J. CASTONGUAY and A. THEORET, Thin Solid Films 69 (1980) 85.