High-performance inductors integrated on porous silicon

IEEE Electron Device Letters

Volumn 26, Issue 2, 2005, Pages 93-95

  Chong, Kyuchul ^a   Xie, Ya Hong ^a   Yu, Kyung Wan ^a   Huang, Daquan ^a   Chang, Mau Chung Frank ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Eddy current; On chip inductor; Porous Si; Quality factor; Substrate effect

Indexed keywords

CAPACITANCE; EDDY CURRENTS; ELECTRIC CONDUCTANCE; ELECTRIC RESISTANCE; NATURAL FREQUENCIES; POROUS SILICON; Q FACTOR MEASUREMENT; SEMICONDUCTOR DEVICE MANUFACTURE; SUBSTRATES;

HIGH PERFORMANCE INDUCTORS; ON-CHIP INDUCTOR; QUALITY FACTOR; SUBSTRATE EFFECT;

ELECTRIC INDUCTORS;

EID: 13444292413     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2004.840546     Document Type: Article

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