Integrated multilayer RF passives in silicon technology

1998 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, SiRF 1998

Volumn 1998-September, Issue , 1998, Pages 141-147

  Burghartz, J N ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MIM DEVICES; MULTILAYERS; SILICON;

ACTIVE DEVICES; FABRICATION PROCESS; HIGH FREQUENCY HF; HIGH QUALITY; INTEGRATED MULTILAYERS; MIM CAPACITORS; RF PASSIVES; SILICON TECHNOLOGIES;

MONOLITHIC INTEGRATED CIRCUITS;

EID: 0345310522     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SMIC.1998.750209     Document Type: Conference Paper

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