Method of creating local semi-insulating regions on silicon wafers for device isolation and realization of high-Q inductors

IEEE Electron Device Letters

Volumn 19, Issue 12, 1998, Pages 461-462

  Liao, Chungpin ^a   Huang, Tzuen Hsi ^a   Lee, Chwan Ying ^a   Tang, Denny ^a   Lan, Shan Ming ^b   Yang, Tsun Neng ^b   Lin, Li Fu ^b  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

^b INSTITUTE OF NUCLEAR ENERGY RESEARCH   (Taiwan)

Author keywords

Isolation technology; Mixed signal IC's; RF

Indexed keywords

DIGITAL INTEGRATED CIRCUITS; ELECTRIC CONDUCTIVITY MEASUREMENT; ELECTRIC INDUCTORS; INTEGRATED CIRCUIT MANUFACTURE; LINEAR INTEGRATED CIRCUITS; PROTONS;

ION CYCLOTRON; MIXED-MODE INTEGRATED CIRCUITS;

SILICON WAFERS;

EID: 0032305654     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/55.735746     Document Type: Article

References (5)

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4. I. Bahl and P. Bhartia, Microwave Solid State Circuit Design. New York: Wiley, 1988, ch. 15.
5. C. P. Yoe and S. S. Wong, "On-chip spiral indoctors with patterned ground shields for Si-based RF IC's, " in 1997 Symp. VLSI Circuits Dig. Tech. Papers. 1997, pp. 85-86.