Scalability potential in ELTRAN SOI-Epi waferTM

IEEE International SOI Conference

Volumn , Issue , 2000, Pages 10-11

  Ito, M ^a   Yamagata, K ^a   Miyabayashi, H ^a   Yonehara, T ^a  

^a CANON INC   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CONTAMINATION; CRYSTAL DEFECTS; INCLUSIONS; MOSFET DEVICES; OPTICAL MICROSCOPY; OPTIMIZATION; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; ULTRATHIN FILMS;

SCALABILITY POTENTIAL;

SILICON ON INSULATOR TECHNOLOGY;

EID: 0034473971     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)