Phase modulation efficiency and transmission loss of silicon optical phase shifters

IEEE Journal of Quantum Electronics

Volumn 41, Issue 2, 2005, Pages 250-257

  Liao, Ling ^a   Liu, Ansheng ^a   Jones, Richard ^a   Rubin, Doron ^b   Samara Rubio, Dean ^a   Cohen, Oded ^b   Salib, Michael ^a   Paniccia, Mario ^a  

^a INTEL CORPORATION   (United States)

^b INTEL CORPORATION   (Israel)

Author keywords

MOS capacitators; Optical losses; Optical phase shifters; Phase modulation; Rib waveguides; Silicon

Indexed keywords

OPTICAL DESIGN; OPTICAL WAVEGUIDES; PHASE MODULATION; PHASE SHIFTERS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE;

OPTICAL LOSSES; OPTICAL PHASE SHIFTERS; RIB WAVEGUIDES;

MOS CAPACITORS;

EID: 13444282485     PISSN: 00189197     EISSN: None     Source Type: Journal    
DOI: 10.1109/JQE.2004.840079     Document Type: Article

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