Deposition of hard metal nitride-like coatings in an electron cyclotron resonance discharge

Surface and Coatings Technology

Volumn 177-178, Issue , 2004, Pages 389-393

  Xiao, Z G ^a   Mantei, T D ^a  

^a UNIVERSITY OF CINCINNATI   (United States)

Author keywords

Chromium nitride like films; Electron cyclotron resonance; Hardness; Plasma enhanced chemical vapor deposition; Titanium nitride like films; Zirconium nitride like films

Indexed keywords

ELECTRON CYCLOTRON RESONANCE; GAS DISCHARGE TUBES; TITANIUM; X RAY PHOTOELECTRON SPECTROSCOPY;

HARD METAL NITRIDE; REACTIVE GAS;

PROTECTIVE COATINGS;

COATING;

EID: 1342332709     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2003.09.013     Document Type: Article

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