Chopping of near- and mid-infrared radiation using a curled electrostatic MEMS actuator

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5074, Issue , 2003, Pages 903-910

  Dausch, David ^a   Goodwin, Scott ^a   Exarhos, Greg ^b  

^a MCNC   (United States)

^b PACIFIC NORTHWEST NATIONAL LABORATORY   (United States)

Author keywords

Electrostatic actuators; IR detectors; MEMS; Micromechanical chopper; Transparent conducting oxides

Indexed keywords

ACTUATORS; ELECTRIC FIELDS; ELECTRODES; INFRARED RADIATION; METALLIC FILMS; MICROELECTROMECHANICAL DEVICES; PLASTIC FILMS; SEMICONDUCTING GLASS; SEMICONDUCTING INDIUM COMPOUNDS; SUBSTRATES;

ELECTROSTATIC ACTUATOR; MICROMECHANICAL CHOPPER; PYROELECTRIC DETECTOR; TRANSPARENT CONDUCTING OXIDE;

INFRARED DETECTORS;

EID: 1342332574     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.488786     Document Type: Conference Paper

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