Electrostatic flexible film actuators as IR choppers for pyroelectric detectors or microbolometers

Proceedings of SPIE-The International Society for Optical Engineering

Volumn 4369, Issue , 2001, Pages 372-379

  Dausch, David ^a   Goodwin Johansson, Scott ^a   McGuire, Gary ^a   Kramer, Leslie ^b   Davidson, Mark ^c  

^a MCNC   (United States)

^b LOCKHEED MARTIN   (United States)

^c UNIVERSITY OF FLORIDA   (United States)

Author keywords

Artificial eyelid; Electrostatic actuators; MEMS; Micromachined choppers; Uncooled IR detectors

Indexed keywords

BOLOMETERS; CHOPPERS (CIRCUITS); ELECTROSTATIC ACTUATORS; LIGHT REFLECTION; LIGHT TRANSMISSION; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OPTICAL SENSORS; OPTICAL SHUTTERS; PLASTIC FILMS; PYROELECTRICITY; THERMAL STRESS;

ARTIFICIAL EYELIDS; FLEXIBLE FILM; INFRARED CHOPPERS; MICROBOLOMETERS; MICROCMAHINED CHOPPERS; PYROELECTRIC DETECTORS; UNCOOLED INFRARED DETECTORS;

INFRARED DETECTORS;

EID: 0035761002     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.445338     Document Type: Article

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