Electrostatic MEMS chopper for uncooled IR detectors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4820, Issue 1, 2002, Pages 261-268

  Dausch, David ^a   Goodwin Johansson, Scott ^b  

^a MCNC   (United States)

^b NONE

Author keywords

Artificial eyelid; Electrostatic actuators; MEMS; Micromechanical chopper; Uncooled IR detectors

Indexed keywords

ARRAYS; ARTIFICIAL INTELLIGENCE; BOLOMETERS; CHOPPERS (CIRCUITS); COMPUTER VISION; ELECTROSTATIC ACTUATORS; INFRARED DETECTORS; PYROELECTRICITY; THERMAL VARIABLES MEASUREMENT;

FOCAL PLANE ARRAYS (FPA);

MICROELECTROMECHANICAL DEVICES;

EID: 0037649017     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.500951     Document Type: Conference Paper

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