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Volumn 4695, Issue , 2002, Pages 451-458

Reduced voltage artificial eyelid for protection of optical sensors

Author keywords

Actuators; Curled films; Electrostatics; MEMS; Optical shutters; Transparent electrodes

Indexed keywords

COMPOSITE STRUCTURES; ELECTRODES; ELECTROSTATICS; INSULATING MATERIALS; INTELLIGENT MATERIALS; MICROELECTROMECHANICAL DEVICES; OPTICAL SHUTTERS; STRESS ANALYSIS; SUBSTRATES; THERMAL EXPANSION;

EID: 0036028453     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.475193     Document Type: Article
Times cited : (14)

References (7)
  • 4
    • 0001203524 scopus 로고    scopus 로고
    • Lateral in-plane displacement microactuators with combined thermal and electrostatic drive
    • X. Sun, X. Gu, and W.N. Carr, "Lateral In-Plane Displacement Microactuators with Combined Thermal and Electrostatic Drive", Proc. Of the Solid State Sensor and Actuator Wksp., pp. 152-155, 1996.
    • (1996) Proc. Of the Solid State Sensor and Actuator Wksp. , pp. 152-155
    • Sun, X.1    Gu, X.2    Carr, W.N.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.