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Volumn 4695, Issue , 2002, Pages 451-458
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Reduced voltage artificial eyelid for protection of optical sensors
a
MCNC
(United States)
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Author keywords
Actuators; Curled films; Electrostatics; MEMS; Optical shutters; Transparent electrodes
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Indexed keywords
COMPOSITE STRUCTURES;
ELECTRODES;
ELECTROSTATICS;
INSULATING MATERIALS;
INTELLIGENT MATERIALS;
MICROELECTROMECHANICAL DEVICES;
OPTICAL SHUTTERS;
STRESS ANALYSIS;
SUBSTRATES;
THERMAL EXPANSION;
TRANSPARENT ELECTRODES;
OPTICAL SENSORS;
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EID: 0036028453
PISSN: 0277786X
EISSN: None
Source Type: Journal
DOI: 10.1117/12.475193 Document Type: Article |
Times cited : (14)
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References (7)
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