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Volumn 4329, Issue 1, 2001, Pages 421-427
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High contrast artificial eyelid for protection of optical sensors
a b c b a d e
a
MCNC
(United States)
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Author keywords
Actuators; Curled films; Electrostatics; MEMS; Optical shutters; Transparent electrodes
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Indexed keywords
ARTIFICIAL ORGANS;
ELECTRODES;
ETCHING;
INFRARED RADIATION;
INSULATING MATERIALS;
MICROELECTROMECHANICAL DEVICES;
OPTICAL SHUTTERS;
STRESS ANALYSIS;
SUBSTRATES;
THERMAL EXPANSION;
THIN FILMS;
ARTIFICIAL EYELID;
CURLED FILMS;
OPTICAL SENSORS;
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EID: 0034779487
PISSN: 0277786X
EISSN: None
Source Type: Journal
DOI: 10.1117/12.432674 Document Type: Article |
Times cited : (7)
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References (5)
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