Topotaxial formation of Mg4Ta2O9 and MgTa2O6 thin films by vapour-solid reactions on MgO (001) crystals

Journal of the European Ceramic Society

Volumn 24, Issue 8, 2004, Pages 2453-2463

  Sun, D C ^a   Senz, S ^a   Hesse, D ^a  

^a MAX PLANCK INSTITUTE OF MICROSTRUCTURE PHYSICS   (Germany)

Author keywords

Mg4Ta2O9; MgO; MgTa2O6; Solid state reactions; Thin films; X ray methods

Indexed keywords

CRYSTALLOGRAPHY; REACTION KINETICS; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

REACTION PRODUCTS; TOPOTAXIAL FORMATION;

MAGNESIUM COMPOUNDS;

CERAMICS;

EID: 1342310163     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jeurceramsoc.2003.07.004     Document Type: Article

References (28)

1. Schmalzried H. Solid State Reactions 1981 Verlag Chemie Weinheim
2. Schmalzried H. Chemical Kinetics in Solids 1995 VCH-Verlag Weinheim
3. Reactivity of Solids, Past, Present and Future, V. V. Boldyrev, Blackwell Science, Oxford, 1996.
4. Schmalzried H. Role of phase boundaries in heterogeneous solid-state reactions (I) Classification and dynamic equilibrium at interfaces Ber. Bunsenges. Phys. Chem. 82 1978 273-277
5. Gösele U. Tu K. N, Growth-kinetics of planar binary diffusion couples-thin-film case versus bulk cases J. Appl. Phys. 53 1982 3252-3260
6. Hesse D. The submicroscopic structure of reaction fronts in solid-solid reactions and its correlation with reaction mechanism and kinetics Solid State Ionics 95 1997 1-15
7. Sieber H. Hesse D. Werner P. Misfit accommodation mechanisms at moving reaction fronts during topotaxial spinel-forming thin-film solid-state reactions: a high-resolution transmission electron microscopy study of five spinels of different misfits Phil. Mag. A 75 1997 889-908
8. Sieber H. Werner P. Hesse D. The atomic structure of the reaction front as a function of the kinetic regime of a spinel-forming solid-state reaction Phil. Mag. A 75 1997 909-924
9. 4 epitaxial films formed by solid state reactions on MgO (100) surfaces Solid State Ionics 101-103 1997 667-672
10. 4/MgO solid reaction front Z. Phys. Chem. 206 1998 117-128
11. 3 vapours and yttria-stabilized zirconia (001) substrates Phil. Mag. A 81 2001 2705-2723
12. Banerjee A. Wise R.L. Plumton D.L. Bevan M. Pas M.F. Crenshaw D.L. Aoyama S. Mansoori M.M. Fabrication and performance of selective HSG storage cells for 256 Mb and 1 Gb DRAM applications IEEE Trans. Electron. Devices ED47 2000 584-592
13. McKinley K.A. Sandler N.P. Tantalum pentoxide for advanced DRAM applications Thin Solid Films 290-291 1996 440
14. Shimada H. Ohmi T. Current drive enhancement by using high-permittivity gate insulator in SOI MOSFET's and its limitation IEEE Trans. Electron. Devices ED43 1996 431
15. + -p junction leakage induced by tantalum pentoxide gate insulator and gate reoxidation Appl. Phys. Lett. 78 2001 3244
16. 5 thin films with exceptionally high dielectric constant Appl. Phys. Lett. 74 1999 2370
17. 5 nanolaminates Appl. Phys. Lett. 68 1996 3737
18. Chou J.C. Hsiao C.N. Comparison of the pH sensitivity of different surfaces on tantalum pentoxide Sensors and Actuators B65 2000 237
19. Polzius R. Schneider T. Biert F.F. Bilitewski U. Koschinski W. Optimization of biosensing using grating couplers: immobilization on tantalum oxide waveguides Biosens. Bioelectron. 11 1996 503
20. x3 intermediate layer by metalorganic chemical vapor deposition Appl. Phys. Lett. 78 2001 49
21. 5 J. Am. Ceram. Soc. 46 1963 174
22. 2+ im Pseudodobrookit- und Tripseudobrookitgitter Z. Anorg. Allg. Chem. 354 1967 208
23. 6 single crystals by floating zone method and their optical properties J. Ceram. Soc. Jpn., Int Edition 101 1993 113
24. 6 thin films on MgO (001) single crystals by vapor-solid reaction J. Am. Ceram. Soc. 86 2003 1049
25. Manabe T. Yamaguchi I. Kondo W. Mizuta S. Kumagai T. Topotaxy of corundum-type tetramagnesium diniobate and ditantalate layers on rock-salt-type magnesium oxide substrates J. Am. Ceram. Soc. 82 1999 2061
26. 9 Z. Anorg. Allg. Chem. 562 1988 87
27. 6 J. Less-Common Metals 142 1988 263
28. Thirumal M. Ganguli A.K. Synthesis and dielectric properties of magnesium niobate-magnesium tantalate solid solutions Mater. Res. Bull. 36 2001 2421