-
2
-
-
0035425737
-
A low-voltage torsional actuator for application in RF-microswitches
-
Plotz F, Michaelis S, Aigner R, Timme H-J, Binder J and Noe R 2001 A low-voltage torsional actuator for application in RF-microswitches Sensors Actuators A 92 312-7
-
(2001)
Sensors Actuators A
, vol.92
, pp. 312-317
-
-
Plotz, F.1
Michaelis, S.2
Aigner, R.3
Timme, H.-J.4
Binder, J.5
Noe, R.6
-
3
-
-
0036544233
-
Modeling of an electrostatic torsional actuator demonstrated with an RF MEMS switch
-
Sattler R, Plotz F, Fattinger G and Wachutka G 2002 Modeling of an electrostatic torsional actuator demonstrated with an RF MEMS switch Sensors Actuators A 97-98 337-46
-
(2002)
Sensors Actuators A
, vol.97-98
, pp. 337-346
-
-
Sattler, R.1
Plotz, F.2
Fattinger, G.3
Wachutka, G.4
-
4
-
-
0001520985
-
An overview of the digital micromirror device (DMD) and its application to projection displays
-
Sampsell J B 1993 An overview of the digital micromirror device (DMD) and its application to projection displays 1993 SID Symp. Digest of Technical Papers vol 24 pp 1012-20
-
(1993)
1993 SID Symp. Digest of Technical Papers
, vol.24
, pp. 1012-1020
-
-
Sampsell, J.B.1
-
5
-
-
0035341434
-
A study of the static characteristics of a torsional micromirror
-
Zhang X M, Chau F S, Quan C, Lam Y L and Liu A Q 2001 A study of the static characteristics of a torsional micromirror Sensors Actuators A 90 73-81
-
(2001)
Sensors Actuators A
, vol.90
, pp. 73-81
-
-
Zhang, X.M.1
Chau, F.S.2
Quan, C.3
Lam, Y.L.4
Liu, A.Q.5
-
6
-
-
0035880215
-
Nanometer precision positioning robots utilizing optimized scratch drive actuators
-
Linderman R J and Bright V M 2001 Nanometer precision positioning robots utilizing optimized scratch drive actuators Sensors Actuators A 91 292-300
-
(2001)
Sensors Actuators A
, vol.91
, pp. 292-300
-
-
Linderman, R.J.1
Bright, V.M.2
-
7
-
-
0036141566
-
Large stroke actuation of continuous membrane for adaptive optics by 3D self-assembled microplates
-
Quevy E, Bigotte P, Collard D and Buchaillot L 2002 Large stroke actuation of continuous membrane for adaptive optics by 3D self-assembled microplates Sensors Actuators A 95 183-95
-
(2002)
Sensors Actuators A
, vol.95
, pp. 183-195
-
-
Quevy, E.1
Bigotte, P.2
Collard, D.3
Buchaillot, L.4
-
8
-
-
0035280918
-
PZT actuated micromirror for fine-tracking mechanism of high-density optical data storage
-
Yee Y, Nam H-J, Lee S-H, Bu J U and Lee J-W 2001 PZT actuated micromirror for fine-tracking mechanism of high-density optical data storage Sensors Actuators A 89 166-73
-
(2001)
Sensors Actuators A
, vol.89
, pp. 166-173
-
-
Yee, Y.1
Nam, H.-J.2
Lee, S.-H.3
Bu, J.U.4
Lee, J.-W.5
-
9
-
-
0035341293
-
High-resolution microgyroscope using vibratory motion adjustment technology
-
Kawai H, Atsuchi K-I, Tamura M and Ohwada K 2001 High-resolution microgyroscope using vibratory motion adjustment technology Sensors Actuators A 90 153-9
-
(2001)
Sensors Actuators A
, vol.90
, pp. 153-159
-
-
Kawai, H.1
Atsuchi, K.-I.2
Tamura, M.3
Ohwada, K.4
-
10
-
-
0034251239
-
Magnetic actuation of bending and torsional vibrations for 2D optical-scanner application
-
Garnier A, Bourouina T, Fujita H, Hiramoto T, Orsier F and Peuzin J-C 2000 Magnetic actuation of bending and torsional vibrations for 2D optical-scanner application Sensors Actuators A 84 156-60
-
(2000)
Sensors Actuators A
, vol.84
, pp. 156-160
-
-
Garnier, A.1
Bourouina, T.2
Fujita, H.3
Hiramoto, T.4
Orsier, F.5
Peuzin, J.-C.6
-
11
-
-
0033079517
-
A micromachined piezoeresistive angular rate sensor with composite beam structure
-
Li X, Bao M, Yang H, Shen S and Lu D 1999 A micromachined piezoeresistive angular rate sensor with composite beam structure Sensors Actuators A 72 217-23
-
(1999)
Sensors Actuators A
, vol.72
, pp. 217-223
-
-
Li, X.1
Bao, M.2
Yang, H.3
Shen, S.4
Lu, D.5
-
12
-
-
0036540563
-
Parabolic and hyperbolic flexure hinges: Flexibility, motion precision and stress characterization based on closed-form compliance equations
-
Lobontiu N, Paine J S N, O'Malley E and Samuelson M 2002 Parabolic and hyperbolic flexure hinges: flexibility, motion precision and stress characterization based on closed-form compliance equations Precis. Eng.: J. Int. Soc. Precis. Eng. Nanotechnol. 26 185-94
-
(2002)
Precis. Eng.: J. Int. Soc. Precis. Eng. Nanotechnol.
, vol.26
, pp. 185-194
-
-
Lobontiu, N.1
Paine, J.S.N.2
O'Malley, E.3
Samuelson, M.4
-
13
-
-
0036567350
-
Design of symmetric conic-section flexure hinges based on closed-form compliance equations
-
Lobontiu N, Paine J S N, Garcia E and Goldfarb M 2002 Design of symmetric conic-section flexure hinges based on closed-form compliance equations Mech. Mach. Theory 37 477-98
-
(2002)
Mech. Mach. Theory
, vol.37
, pp. 477-498
-
-
Lobontiu, N.1
Paine, J.S.N.2
Garcia, E.3
Goldfarb, M.4
|