Magnetic actuation of bending and torsional vibrations for 2D optical-scanner application

Sensors and Actuators, A: Physical

Volumn 84, Issue 1, 2000, Pages 156-160

  Garnier, A ^a   Bourouina, T ^a   Fujita, H ^a   Hiramoto, T ^a   Orsier, E ^a,b   Peuzin, J C ^c  

^a TOKYO UNIVERSITY OF SCIENCE   (Japan)

^b CEA LETI   (France)

^c LABORATOIRE DE CRISTALLOGRAPHIE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER BEAMS; CHEMICAL VAPOR DEPOSITION; MAGNETIC FIELDS; MAGNETIC THIN FILMS; MAGNETIZATION; MAGNETOSTRICTIVE DEVICES; RESONATORS; SCANNING; SILICON ON INSULATOR TECHNOLOGY; VIBRATIONS (MECHANICAL);

MAGNETIC ACTUATOR; NONLINEAR RESONATOR; OPTICAL SCANNER;

MICROACTUATORS;

EID: 0034251239     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00301-5     Document Type: Article

References (12)

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