High vacuum based deposition of carbon-based films for industrial applications

Proceedings, Annual Technical Conference - Society of Vacuum Coaters

Volumn , Issue , 2001, Pages 407-410

  Grischke, M ^a   Herb, R ^a   Massler, O ^a   Karner, J ^a   Eberle, H ^a  

^a Balzers Limited   (Liechtenstein)

Author keywords

Carbon, and diamond like carbon (DLC); Equipment; Sputter deposition; Wear resistant coatings

Indexed keywords

AUTOMOTIVE ENGINEERING; CARBON; COST EFFECTIVENESS; ENERGY UTILIZATION; INDUSTRIAL APPLICATIONS; PROTECTIVE COATINGS; SPUTTER DEPOSITION; WEAR RESISTANCE;

COATING EQUIPMENTS; WEAR-RESISTANT COATINGS;

VACUUM DEPOSITED COATINGS;

EID: 0035208772     PISSN: 07375921     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)