Microstructure and mechanical properties of polycrystalline NbN/TaN superlattice films

Journal of Materials Science

Volumn 35, Issue 14, 2000, Pages 3535-3538

  Xu, Junhua ^a   Gu, Mingyuan ^a   Li, Geyang ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; FILM GROWTH; HIGH RESOLUTION ELECTRON MICROSCOPY; INTERFACES (MATERIALS); LATTICE CONSTANTS; MAGNETRON SPUTTERING; MICROHARDNESS; STAINLESS STEEL; STRAIN; SUBSTRATES; SUPERLATTICES; X RAY DIFFRACTION ANALYSIS;

MICROHARDNESS TESTER; NIOBIUM NITRIDE; SUPERHARDNESS EFFECTS; SUPERLATTICE FILMS; TANTALUM NITRIDE;

NITRIDES;

EID: 0034228895     PISSN: 00222461     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1004853211220     Document Type: Article

References (8)

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