Full MEMS monolithic microcolumn for wafer-level arrayal

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 6, 2004, Pages 2912-2916

  Kim, Hak ^a   Han, Changho ^a   Kim, Jinkwang ^a   Kim, Hoseob ^b   Chun, Kukjin ^a  

^a Seoul National University   (South Korea)

^b SunMoon University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATION; COMPUTER SIMULATION; ELECTRON BEAM LITHOGRAPHY; ELECTROPLATING; METALLIZING; OPTIMIZATION; PHOTORESISTORS; PROJECTION SYSTEMS; VOLTAGE MEASUREMENT;

EMISSION CURRENTS; MICROCOLUMN; MINIATURIZATION; WAFER-LEVEL ARRAYAL;

MICROELECTROMECHANICAL DEVICES;

EID: 13244290284     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1824952     Document Type: Conference Paper

References (10)

1. T. H. P. Chang, D. P. Kern, and L. P. Muray, J. Vac. Sci. Technol. B 10, 2743 (1992).
2. T. H. P. Chang, M. G. R. Thomson, E. Kratschmer, H. S. Kim, M. L. Yu, K. Y. Lee, S. A. Rishton, B. W. Hussey, and S. Zolgharnain, J. Vac. Sci. Technol. B 14, 3774 (1996).
3. L. P. Muray, J. P. Spallas, C. Stebler, K. Lee, M. Mankos, Y. Hsu, M. Gmur, and T. H. P. Chang, J. Vac. Sci. Technol. B 18, 3099 (2000).
4. J. Park, H. Choi, Y. Lee, S. Kang, K. Chun, S. Park, and Y. Kuk, J. Vac. Sci. Technol. A 15, 1499 (1997).
5. E. Kratschmer, H. S. Kim, M. G. R. Thomson, K. Y. Lee, S. A. Rishton, M. L. Yu, S. Zolgharnain, B. W. Hussey, and T. H. P. Chang, J. Vac. Sci. Technol. B 14, 3792 (1996).
6. M. Mankos, A. Sagle, S. T. Coyle, and A. Fernandez, J. Vac. Sci. Technol. B 19, 2566 (2001).
7. L. P. Muray, J. P. Spallas, C. Stebler, K. Lee, M. Mankos, Y. Hsu, M. Gmur, and T. H. P. Chang, J. Vac. Sci. Technol. B 18, 3099 (2000).
8. H. Kim, C. H. Han, H. W. Seo, H. S. Kim, and K. J. Chun, in Proceedings of the 46 Internation Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, 2002, p. 47.
9. H. Kim, C. H. Han, and K. J. Chun, Jpn. J. Appl. Phys., Part 1 42, 4084 (2003).
10. J. H. Lee, K. R. Kwon, M. B. Lee, S. H. Hahm, K. M. Choi, and J. H. Lee, J. Semicond. Technol. Sci. 2, 93 (2002).