The novel deflector for multi arrayed microcolumn using microelectromechanical system (MEMS) technology

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 6 B, 2003, Pages 4084-4088

  Kim, Hak ^a   Han, Changho ^a   Chun, Kukjin ^a  

^a Seoul National University   (South Korea)

Author keywords

Arrayed microcolumn; Deflector; Delay; Electron beam; Imulation program with integrated circuit emphasis (SPICE); Lithography; Microcolumn; Microelectromechanical system (MEMS); Multiple arrayed deflectors

Indexed keywords

ANODES; BONDING; ELECTRON BEAMS; INTEGRATED CIRCUIT MANUFACTURE; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS;

MICROCOLUMNS;

MICROELECTROMECHANICAL DEVICES;

EID: 0042362144     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.4084     Document Type: Conference Paper

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