SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Brazilian Journal of Physics

Volumn 34, Issue 4 B, 2004, Pages 1689-1695

Two dimensional computer simulation of plasma immersion ion implantation

(3) Kostov, K G b Barroso, J J a Ueda, M a

a INSTITUTO NACIONAL DE PESQUISAS ESPACIAIS (Brazil)

b SÃO PAULO STATE UNIVERSITY UNESP (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 12844282024 PISSN: 01039733 EISSN: None Source Type: Journal
DOI: 10.1590/S0103-97332004000800033 Document Type: Conference Paper

Times cited : (15)

References (21)

1
- 0003816217
- Cambridge University Press, Cambridge
- M. Nastasi and J. W. Meyer, Ion-Solid Interactions: Fundamentals and Applications, Cambridge University Press, Cambridge, (1996).
- (1996) Ion-solid Interactions: Fundamentals and Applications
- Nastasi, M.¹ Meyer, J.W.²

2
- 0042633781
- J. R. Conrad, J. L. Radtke, R. A. Dodd, F. J. Worzala, and N. C. Tran, J. Appl. Phys. 62, 4591 (1987).
- (1987) J. Appl. Phys. , vol.62 , pp. 4591
- Conrad, J.R.¹ Radtke, J.L.² Dodd, R.A.³ Worzala, F.J.⁴ Tran, N.C.⁵

3
- 2142778955
- M. A. Lieberman, J. Appl. Phys. 66, 2926 (1989).
- (1989) J. Appl. Phys. , vol.66 , pp. 2926
- Lieberman, M.A.¹

4
- 0000528603
- J. T. Scheuer, M. Shamin, and J. R. Conrad, J. Appl. Phys. 67, 1241 (1990).
- (1990) J. Appl. Phys. , vol.67 , pp. 1241
- Scheuer, J.T.¹ Shamin, M.² Conrad, J.R.³

5
- 0000995105
- V. Vahedi, M. A., M. A. Lieberman, M. A. Alves, P. P. Verboncoeur, and C. K. Birdsall, J. Appl. Phys. 69, 2008 (1991).
- (1991) J. Appl. Phys. , vol.69 , pp. 2008
- Vahedi, V.¹ Lieberman, M.A.² Alves, M.A.³ Verboncoeur, P.P.⁴ Birdsall, C.K.⁵

6
- 0000179593
- R. A. Steward and M. A. Lieberman, J. Appl. Phys. 70, 3481 (1991).
- (1991) J. Appl. Phys. , vol.70 , pp. 3481
- Steward, R.A.¹ Lieberman, M.A.²

7
- 0001174669
- K. U. Riemann and Th. Daube, J. Appl. Phys. 86, 1202 (1999).
- (1999) J. Appl. Phys. , vol.86 , pp. 1202
- Riemann, K.U.¹ Daube, T.²

8
- 0001578427
- B. P. Wood, J. Appl. Phys. 73, 4770 (1993).
- (1993) J. Appl. Phys. , vol.73 , pp. 4770
- Wood, B.P.¹

9
- 12844266308
- B. Briehl and H. M. Urbassek, Surf. Coat. Technol. 131-135, 156, (2001).
- (2001) Surf. Coat. Technol. , vol.131-135 , pp. 156
- Briehl, B.¹ Urbassek, H.M.²

10
- 0037464228
- D. T. K. Kwok, M. M. Bilek, D. R. McKenzie, and P. K. Chu, Appl. Phys. Lett. 82, 1827 (2003).
- (2003) Appl. Phys. Lett. , vol.82 , pp. 1827
- Kwok, D.T.K.¹ Bilek, M.M.² McKenzie, D.R.³ Chu, P.K.⁴

11
- 0033871242
- P. Huber, G. Keller, J. W. Gerlach, S. Mandl, W. Assmann, and B. Rauschenbach, Nucl. Instr. Meth. B, 161-163, 1085 (2000).
- (2000) Nucl. Instr. Meth. B , vol.161-163 , pp. 1085
- Huber, P.¹ Keller, G.² Gerlach, J.W.³ Mandl, S.⁴ Assmann, W.⁵ Rauschenbach, B.⁶

12
- 0038736108
- R. Faehl, B. Voider, B. Wood, J. Vac. Sci. Technol. B12, 884 (1994).
- (1994) J. Vac. Sci. Technol. B , vol.12 , pp. 884
- Faehl, R.¹ Voider, B.² Wood, B.³

13
- 0031551659
- D. J. Rej, R. J. Faehl, J. N. Matossian, Surf. Coat. Technol. 96, 45 (1997).
- (1997) Surf. Coat. Technol. , vol.96 , pp. 45
- Rej, D.J.¹ Faehl, R.J.² Matossian, J.N.³

14
- 0343395851
- G. Keller, S. Mandl, U. Rude, B. Rauschenbach, Surf. Coat. Technol. 136, 117 (2001).
- (2001) Surf. Coat. Technol. , vol.136 , pp. 117
- Keller, G.¹ Mandl, S.² Rude, U.³ Rauschenbach, B.⁴

15
- 0038581237
- B. Rauschenbach and S. Mandl, Nucl. Instr. Meth. B, 206, 803 (2003).
- (2003) Nucl. Instr. Meth. B , vol.206 , pp. 803
- Rauschenbach, B.¹ Mandl, S.²

16
- 0000613138
- M. M. Shamin, J. T. Scheuer, R. P. Fetherston, and J. R. Conrad, J. Appl. Phys. 70, 4756 (1991).
- (1991) J. Appl. Phys. , vol.70 , pp. 4756
- Shamin, M.M.¹ Scheuer, J.T.² Fetherston, R.P.³ Conrad, J.R.⁴

17
- 0000797840
- D. J. Rej, B. P. Wood, R. J. Faehl, H. H. Fleischmann, J. Vac. Technol. B 12, 861 (1994).
- (1994) J. Vac. Technol. B , vol.12 , pp. 861
- Rej, D.J.¹ Wood, B.P.² Faehl, R.J.³ Fleischmann, H.H.⁴

18
- 0003836233
- Berkeley, Research Associated, Berkeley, USA
- V. P. Tarakanov User's Manual for Code KARAT, Berkeley, Research Associated, Berkeley, USA 1994.
- (1994) User's Manual for Code KARAT
- Tarakanov, V.P.¹

19
- 0000487044
- M. Ueda, L. A. Berni, G. F. Gomes, A. F. Beloto, E. Abramoff, and H. Reuther, J. Appl. Phys. 86, 4821 (1999).
- (1999) J. Appl. Phys. , vol.86 , pp. 4821
- Ueda, M.¹ Berni, L.A.² Gomes, G.F.³ Beloto, A.F.⁴ Abramoff, E.⁵ Reuther, H.⁶

20
- 0033700811
- L. A. Berni, M. Ueda, G. F. Gomes, A. F. Beloto, and H. Reuther, J. Phys. D.: Appl. Phys. 33, 1592 (2000).
- (2000) J. Phys. D.: Appl. Phys. , vol.33 , pp. 1592
- Berni, L.A.¹ Ueda, M.² Gomes, G.F.³ Beloto, A.F.⁴ Reuther, H.⁵

21
- 0038413461
- D. L. Tang, R. K. Y. Fu, X. B. Tian, P. Peng, and P. K. Chu, Nucl. Instr. Meth. B, 206, 808 (2003)
- (2003) Nucl. Instr. Meth. B , vol.206 , pp. 808
- Tang, D.L.¹ Fu, R.K.Y.² Tian, X.B.³ Peng, P.⁴ Chu, P.K.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.