Modification of nanoporous silica structures by fluorocarbon plasma treatment

Materials Research Society Symposium Proceedings

Volumn 812, Issue , 2004, Pages 103-108

  Cho, Woojin ^a   Saxena, Ravi ^a   Rodriguez, Oscar ^a   Achanta, Ravi ^a   Ojha, Manas ^a   Plawsky, Joel L ^a   Gill, William N ^a   Baklanov, Mikhail R ^b  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

^b IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC MATERIALS; FLUOROCARBONS; HYDROGEN; METALLIZING; MORPHOLOGY; PERMITTIVITY; PLASMAS; POLYMERIZATION; POLYMERS; POROUS MATERIALS; REFRACTIVE INDEX; SCANNING ELECTRON MICROSCOPY; SURFACES;

FLUOROCARBON PLASMA TREATMENT; INTERLAYER DIELECTRICS (ILD); NANOPOROUS MATERIALS; REACTOR PRESSURE;

SILICA;

EID: 12844273495     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-812-f6.7     Document Type: Conference Paper

References (12)

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