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Physics Letters, Section A: General, Atomic and Solid State Physics

Volumn 335, Issue 5-6, 2005, Pages 430-434

Performance of the 13.5 nm PVC capillary discharge EUV source

(4) Andreić, Željko a Ellwi, Samir Shakir b Pleslić, Sanda c Kunze, Hans Joachim d

a UNIVERSITY OF ZAGREB (Croatia)

b IMPERIAL COLLEGE LONDON (United Kingdom)

c UNIVERSITY OF ZAGREB (Croatia)

d RUHR UNIVERSITY BOCHUM (Germany)

Author keywords

Ablative capillary discharge; EUV sources

Indexed keywords

ADDITIVES; CAPILLARY FLOW; EXTREME ULTRAVIOLET LITHOGRAPHY; LIGHT SOURCES;

CAPILLARY DISCHARGES; CHEMICAL ADDITIVE; DISCHARGE PARAMETERS; EUV SOURCE; HIGH CONVERSION EFFICIENCY; NARROW-BAND RADIATION; PRODUCTION PROCESS; SN CONCENTRATION;

TIN;

ARTICLE; PRODUCTIVITY; RADIATION ENERGY; ULTRAVIOLET RADIATION;

EID: 12844272249 PISSN: 03759601 EISSN: None Source Type: Journal
DOI: 10.1016/j.physleta.2004.12.061 Document Type: Article

Times cited : (12)

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