In-band EUV radiation of ablative capillary discharges in PVC

Vacuum

Volumn 71, Issue 1-2 SPEC., 2003, Pages 229-232

  Andreic Z ^a   Ellwi, S ^b   Pleslic S ^c   Kunze, H J ^b  

^a RUDER BO KOVI INSTITUTE   (Croatia)

^b RUHR UNIVERSITY BOCHUM   (Germany)

^c UNIVERSITY OF ZAGREB   (Croatia)

Author keywords

13.5 nm source; Ablative capillary discharge; EUV source

Indexed keywords

BAND STRUCTURE; CAPILLARITY; ELECTRIC DISCHARGES; LITHOGRAPHY;

ABLATIVE CAPILLARY DISCHARGES;

POLYVINYL CHLORIDES;

EID: 0037427391     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(02)00742-X     Document Type: Conference Paper

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