A simple XUV source at 13.5 nm based on ablative capillary discharge

Surface Review and Letters

Volumn 9, Issue 1, 2002, Pages 627-630

  Andreić, Željko ^a   Ellwi, Samir Shakir ^b   Pleslić, Sanda ^c   Kunze, Hans Joachim ^d  

^a RUDER BO KOVI INSTITUTE   (Croatia)

^b ASML   (Netherlands)

^c UNIVERSITY OF ZAGREB   (Croatia)

^d RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

POLYACETAL; POLYMER; POLYVINYLCHLORIDE; UNCLASSIFIED DRUG;

CONFERENCE PAPER; MATERIALS; MATERIALS TESTING; RADIATION ENERGY; ULTRAVIOLET RADIATION;

EID: 0036462878     PISSN: 0218625X     EISSN: None     Source Type: Journal    
DOI: 10.1142/S0218625X02002920     Document Type: Conference Paper

References (11)