Characteristics of Capillary Discharges as EUV Sources of Radiation in Range of 10...16 nm

Strojarstvo

Volumn 44, Issue 3-6, 2002, Pages 185-188

  Pleslić, Sanda ^a   Andreić, Željko ^b   Ellwi, Samir ^c   Kunze, Hans Joachim ^c  

^a UNIVERSITY OF ZAGREB   (Croatia)

^b RUDER BO KOVI INSTITUTE   (Croatia)

^c RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

Ablative capillary discharge; EUV radiation sources; PVC capillary

Indexed keywords

LITHOGRAPHY; POLYVINYL CHLORIDES; ULTRAVIOLET RADIATION;

CAPILLARY DISCHARGES;

CAPILLARITY;

EID: 0141835867     PISSN: 05621887     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (9)

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2. TOMASEL, F. G.; ROCCA, J. J.; CORTAZAR, O. D.; SZAPIRO, B. T.; LEE, R. W.:Plasma-density Evolution in Compact Polyacetal Capillary Discharges, Physical Review E (1993), Vol. 47, No. 5, 3590-3597.
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6. ALIMI, R., GOLDENBERG, C.; PEREMUTTER, R.; MELNIK, D. ; ZOLER, D.:The Effect of External Pressure on the Plasma Parameters in Ablative Capillary Discharges, IEEE Transactions on magnetics, Vol. 35, No. 1 (1999), 175-180.
7. BOBOC, T.; BISCHOFF, R.; LANGHOFF, H.: Emission in the Extreme Ultraviolet by Xenon Excited in a Capillary Discharge, J. Phys. D: Appl. Phys. 34 (2001) 2512-2517.
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9. ANDREIĆ,Ž.;ELLWI, S. S.; PLESLIĆ, S.;KUNZE, H.-J.: A Simple XUV Source at 13,5 nm Based on Ablative Capillary Discharge, Surface Review and Letters 9 (2002) 627-630.