Total Dose Degradation of MEMS Optical Mirrors

IEEE Transactions on Nuclear Science

Volumn 50, Issue 6 I, 2003, Pages 1860-1866

  Miyahira, T F ^a   Becker, H N ^a   McClure, S S ^b   Edmonds, L D ^a   Johnslon, A H ^a   Hishinuma, Y ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^b NORTHROP GRUMMAN CORPORATION   (United States)

Author keywords

MEMS micromirror; MOEMS; Piezoelectric; Radiation damage; Total dose

Indexed keywords

ELECTRIC POTENTIAL; ELECTROCHEMICAL ELECTRODES; ELECTROSTATICS; GAMMA RAYS; IONIZING RADIATION; MIRRORS; PIEZOELECTRIC DEVICES; POLYSILICON; RADIATION DAMAGE; SILICON WAFERS;

MICROELECTROMECHANICAL (MEMS) MIRRORS; MOEMS; TOTAL DOSE;

MICROELECTROMECHANICAL DEVICES;

EID: 1242265288     PISSN: 00189499     EISSN: None     Source Type: Journal    
DOI: 10.1109/TNS.2003.820764     Document Type: Conference Paper

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