Control of the nitrogen content in nanocomposite TiN/SiNx coatings deposited by an arc-sputter hybrid process

Composites Science and Technology

Volumn 65, Issue 5 SPEC. ISS., 2005, Pages 799-803

  Haug, Franz Josef ^a   Bonderer, L ^a   Schwaller, P ^a   Patscheider, Joerg ^a   Tobler, M ^b   Karimi, A ^c  

^a SWISS FEDERAL LABORATORIES FOR MATERIALS SCIENCE AND TECHNOLOGY   (Switzerland)

^b No 1 Industrial Estate   (Switzerland)

^c EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CROSSLINKING; HARDNESS; MAGNETRON SPUTTERING; NITROGEN; OXIDATION RESISTANCE; SILICON NITRIDE; STOICHIOMETRY; TITANIUM NITRIDE;

ARC-SPUTTER HYBRID PROCESS; INDUSTRIAL ARC SOURCES; NITRIDATION;

NANOSTRUCTURED MATERIALS;

COATINGS;

EID: 12344286123     PISSN: 02663538     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.compscitech.2004.10.013     Document Type: Article

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