Effect of sputtering target power on preferred orientation in nc-TiN/a-SiNx nanocomposite thin films

Journal of Metastable and Nanocrystalline Materials

Volumn 23, Issue , 2005, Pages 175-178

  Zhang, Sam ^a   Sun, Deen ^a   Fu, Yongqing ^a   Du, Hejun ^a   Zhang, Qing ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Nanocomposite; Preferred Orientation; Texture

Indexed keywords

AMORPHOUS SILICON; CRYSTAL ORIENTATION; DEPOSITION; LATTICE CONSTANTS; MAGNETRON SPUTTERING; TEXTURES; THIN FILMS; TITANIUM NITRIDE;

CRYSTALLITES; NANOCOMPOSITE; NC-TIN/SINX FILM; PREFERRED ORIENTATION;

NANOSTRUCTURED MATERIALS;

EID: 12344283604     PISSN: 14226375     EISSN: None     Source Type: Journal    
DOI: 10.4028/www.scientific.net/JMNM.23.175     Document Type: Conference Paper

References (20)

1. S.Veprek and S. Reiprich, Thin Solid Films, 268 (1995) 64.
2. Sam Zhang, Deen Sun, Yongqing Fu and Hejun Du, Surf. Coat. Technol., 167 (2003) 113.
3. Sam Zhang, Deen Sun and Yongqing Fu, J. Mater. Sci. Technol., V18 (6) (2002) 485.
4. B. Cantor and C. M. Allen, Scripta Mater. 44 (2001) 2055.
5. A I Gusev, Physics-Uspekhi, 41(1) (1998) 49.
6. D. M. Bubb, B. R. Ringeisen and P. W. Wu, J. Appl. Phys., 89(10) (2001) 5739.
7. Sam Zhang, Deen Sun, Yongqing Fu and Hejun Du, Thin Solid Films (in press).
8. F.Vaz, L.Rebouta, B.Almeida, et al., Surf. Coat. Technol., 120-121 (1999) 166.
9. B. H. Park, Y. I. Kim and K. H. Kim, Thin Solid Films, 348 (1999) 210.
10. D.M.Lee, J. Mater. Sci. 24 (1989) 4375.
11. M.Jones, I.R.McColl, D.M.Grant, Surf. Coat. Technol. 132 (2000) 143.
12. H.E.Cheng, M.H.Hon, J. Appl. Phys. 79 (1996) 8047.
13. Y.H.Cheng, B.K.Tay, Journal of Crystal Growth 252 (2003) 257.
14. J. Pelleg, L.Z.Zevin, and S.Lungo, Thin Solid Films 197 (1991) 117.
15. J. Pelleg, L.Z.Zevin, S.Lungo and N.Croitoru, Thin Solid Films 169 (1989) 117.
16. U.C.Oh and Jung Ho Je, J. Appl. Phys. 74(3) 1993, 1692.
17. Edzo Zoestbergen, X-ray Analysis of Protective Coatings, Thesis, Rijksuniversiteit Groningen, 2000.
18. J. H. Je, D. Y. Noh, H. K. Kim and K. S. Liang, J. Appl. Phys. 81 (9) (1997) 6126.
19. L. Hultmann, J.-E. Sundgren, J. Appl. Phys. 66 (1989) 536.
20. th Ed. John Wiley & Sons, Inc. 2003.