Adaptive optimization in ultrafast laser material processing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5448, Issue PART 1, 2004, Pages 73-83

  Stoian, Razvan ^a   Mermillod Blondin, Alexandre ^a   Rosenfeld, Arkadi ^a   Hertel, Ingolf V ^a   Spyridaki, Maria ^b   Koudoumas, Emmanuel ^b   Fotakis, Costas ^b   Burakov, Igor M ^c   Bulgakova, Nadezhda M ^c  

^a MAX BORN INSTITUT   (Germany)

^b INSTITUTE OF ELECTRONIC STRUCTURE AND LASER   (Greece)

^c KUTATELADZE INSTITUTE OF THERMOPHYSICS   (Russian Federation)

Author keywords

Adaptive optimization; Femtosecond ablation; Material processing; Pulse shaping

Indexed keywords

ELECTRIC EXCITATION; MODULATION; OPTIMIZATION; PHASE TRANSITIONS; SEMICONDUCTOR MATERIALS; SYNCHRONIZATION; SYNTHESIS (CHEMICAL);

ADAPTIVE OPTIMIZATION; FEMTOSECOND ABLATION; MATERIAL PROCESSING; PULSE SHAPING;

LASER ABLATION;

EID: 12144256390     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.547267     Document Type: Conference Paper

References (45)

1. E. N. Glezer and E. Mazur, "Ultrafast-laser driven micro-explosions in transparent materials", Appl. Phys. Lett. 71, pp. 882-884, 1997.
2. F. Korte, S. Nolte, B. N. Chichkov, T. Bauer, G. Kamlage, T. Wagner, C. Fallnich, and H. Welling, "Far-field and near-field material processing with femtosecond laser pulses", Appl. Phys. A: Mater. Sci. Process. 69, pp. S7-S11, 1999.
3. X. Liu, D. Du, and G. Mourou, "Laser ablation and micromachining with ultrashort laser pulses", IEEE J. Quantum. Elec. 33, pp. 1706-1716, 1997.
4. M. Lezner, J. Krüger, S. Sartania, Z. Cheng, Ch. Spielmann, G. Mourou, W. Kautek, and F. Krausz, "Femtosecond optical breakdown in dielectrics", Phys. Rev. Lett. 80, pp. 4076-4079, 1998.
5. F. Korte, S. Adams, A. Egbert, C. Fallnich, and A. Ostendorf, "Sub-diffraction limited structuring of solid targets with femtosecond laser pulses" Opt. Exp. 7, pp. 41-49, 2000.
6. B. C. Stuart, M. D. Feit, A. M. Rubenchik, B. W. Shore, and M. D. Perry, "Laser-induced damage in dielectrics with nanosecond to subpicosecond pulses", Phys. Rev. Lett. 74, pp. 2248-2251, 1995.
7. A.-C. Tien, S. Backus, H. C. Kapteyn, M. M. Murnane, and G. Mourou, "Short-pulse laser damage in transparent materials as a function of pulse duration", Phys. Rev. Lett, 82, pp. 3883-3886, 1999.
8. D. Ashkenasi, H. Varel. A. Rosenfeld, F. Noack, and E.E.B. Campbell, "Pulse-width influence on laser structuring of dielectrics", Nucl. Instr. Meth. B 122, pp. 359-363, 1997.
9. 2 and CaF2 with picosecond and femtosecond laser pulses", Appl. Phys. A: Mater. Sci. Process. 62, pp. 293-294, 1996.
10. R. Stoian, M. Boyle, A. Thoss, A. Rosenfeld, G. Korn, E. E. B. Campbell and I. V. Hertel, "Laser ablation of dielectrics with temporally shaped femtosecond pulses", Appl. Phys. Lett. 80, pp. 353-355, 2002.
11. A. M. Weiner, "Femtosecond Pulse Shaping Using Spatial Light Modulators", Rev. Sci Instrum. 71, pp. 1929-1960, 2000.
12. J. P. Heritage, R. N. Thurston, W. J. Tomlinson, A. M. Weiner, and R. H. Stollen, "Spectral windowing of frequency-modulated optical pulses in a grating compressor", Appl. Phys. Lett. 47, pp. 87-89, 1985.
13. R. S. Judson and H. Rabitz, "Teaching lasers to control molecules" Phys. Rev. Lett. 68, pp. 1500-1503, 1992.
14. D. Meshulach and Y. Silberberg, "Coherent quantum control of two-photon transitions by a femtosecond laser pulse", Nature 396, pp. 239-242, 1998.
15. T. C. Weinacht, R. Bartels, S. Backus, P. H. Bucksbaum, B. Pearson, J. M. Geremia, H. Rabitz, H. C. Kapteyn, and M. M. Murnane, "Coherent learning control of vibrational motion in room temperature molecular gases", Chem. Phys. Lett. 344, pp. 333-338, 2001.
16. T. Feurer, J. C. Vaughan, and K. A. Nelson, "Spatiotemporal coherent control of lattice vibrational waves", Science 299, pp. 374-377, 2003.
17. A. Assion, T. Baumert, M. Bergt, T. Brixner, B. Kiefer, V. Seyfried, M. Strehle, and G. Gerber, "Control of chemical reactions by feedback-optimized phase-shaped femtosecond laser pulses", Science 282, pp. 919-922, 1998.
18. R. Bartels, S. Backus, E. Zeek, L. Misoguti, G. Vdovin, I.P. Christov, M.M. Murnane, and H.C. Kapteyn, "Shaped-pulse optimization of coherent emission of high-harmonic soft X-rays," Nature 406, pp. 164-166, 2000.
19. J. Kunde, B. Baumann, S. Arlt, F. Morier-Genoud, U. Siegner, and U. Keller," Optimization of adaptive feedback control for ultrafast semiconductor spectroscopy" J. Opt. Soc. Am. B 18, 872, 2001.
20. M. Spyridaki, E. Koudoumas, P. Tzanetakis, C. Fotakis, R. Stoian, A. Rosenfeld, and I. V. Hertel, "Temporal pulse manipulation and ion generation in ultrafast laser ablation of silicon", Appl. Phys. Lett. 83, 1474-1476, 2003.
21. H. Varel, M. Wahmer, A. Rosenfeld, D. Ashkenasi, and E. E. B. Campbell, "Femtosecond laser ablation of sapphire: time-of-flight analysis of ablation plume", Appl. Surf. Sci. 127-129 pp. 128-133, 1998.
22. R. Stoian, H. Varel, A. Rosenfeld, D. Ashkenasi, R. Kelly, and E.E.B. Campbell, "Ion time-of-flight analysis of ultrashort pulsed laser-induced procesing of Al2O3", Appl. Surf. Sci. 165, pp. 44-55, 2000.
23. J. Siegel, K. Ettrich, E. Welsch, and E. Matthias, "UV-laser ablation of ductile and brittle metal films", Appl.Phys.A 64, pp. 213-218, 1997.
24. S. Guizard, P. D'Oliveira, P. Daguzan, P. Martin, P. Meynadier, and G. Petite, "Time-resolved studies of carriers dynamics in wide band gap materials", Nucl. Instr. Meth. Phys. B 116, pp. 43-48, 1996.
25. F. Quere, S. Guizard, P. Martin, G. Petite, O. Gobert, P. Meynadier, and M. Perdrix, "Ultrafast carrier dynamics in laser-excited materials: subpicosecond optical studies", Appl. Phys. B Lasers O, 68, pp. 459-463, 1999.
26. M. Li, S. Menon, J. P. Nibarger, and G. N. Gibson, "Ultrafast electron dynamics in femtosecond optical breakdown of dielectrics", Phys. Rev. Lett. 82, pp. 2394-2397, 1999.
27. R. Lindner, M. Reichling, R. T. Williams, E. Matthias, "Femtosecond laser pulse excitation of electrons and excitons in CaF2 and SrF2", J. Phys.: Condens. Matter 13, pp. 2339-2346, 2001.
28. R. Stoian, M. Boyle, A. Thoss, A. Rosenfeld, G. Korn, and I.V. Hertel, "Dynamic temporal pulse shaping in advanced ultrafast laser material processing", Appl. Phys. A 77, pp. 265-269, 2003.
29. N. M. Bulgakova, R. Stoian, A. Rosenfeld, I. V. Hertel, and E. E. B. Campbell "Electronic transport and consequences for material removal in ultrafast pulsed laser ablation of materials", Phys. Rev. B 69, 054102 (2004).
30. R. Stoian, A. Rosenfeld, D. Ashkenasi, I. V. Hertel, N. M. Bulgakova, and E. E. B. Campbell, "Surface charging and impulsve ion ejection during ultrashort pulsed laser ablation", Phys. Rev. Lett. 88, 097603, 2002.
31. 3", Phys. Rev. B. 62, pp. 13167-13173, 2000.
32. C. W. Siders, A. Cavalleri, K. Sokolowski-Tinten, C. Toth, T. Guo, M. Kammler, M. H. von Hoegen, K. R. Wilson, D. von der Linde, and C. P. J. Barty, "Detection of nonthermal molting by ultrafast X-ray diffraction", Science 286, pp. 1340-1342, 1999.
33. A. Rousse, C. Rischel, S. Fourmaux, I Uschmann, S. Sebban, G. Grillon, P Balcou, E. Foster, J. P. Geindre, P. Audebert, J. C. Gauthier, and D. Hulin "Non-thermal melting in semiconductors measured at femtosecond resolution", Nature 410, pp. 65-68, 2001.
34. J. P. Callan, A. M. -T. Kim, C. A. D. Roeser, and E. Mazur, "Universal dynamics during and after ultrafast laser-induced semiconductor-to-metal transitions", Phys. Rev. B 64, 073201, 2001.
35. C. V. Shank, R. Yen, and C. Hirlimann, "Femtosecond-Time-Resolved Surface Structural Dynamics of Optically Excited Silicon", Phys. Rev. Lett. 51, pp. 900-902, 1983.
36. P. Stampfli and K. H. Bennemann, "Theory for the time dependence of the laser-induced instability of the diamond structure of Si and GaAs", J.Phys.:Condens. Matter 5, pp. A173-A174, 1993.
37. K. Sokolowski-Tinten, J. Bialkowski, A. Cavalleri, D. von der Linde, A. Oparin, J. Meyer-ter-Vehn, S. I. Anisimov, "Transient States of Matter during Short Pulse Laser Ablation", Phys. Rev. Lett. 81, pp. 224-227, 1998.
38. K. Sokolowski-Tinten, J. Solis, J. Bialkowski, J. Siegel, C. N. Afonso, D. von der Linde D, "Dynamics of ultrafast phase changes in amorphous GeSb films", Phys. Rev. Lett. 81, pp. 3679-3682, 1998.
39. K. Sokolowsky-Tinten and D. von der Linde, "Generation of dense electron-hole plasmas in silicon" Phys. Rev. B 61, pp. 2643-2650, 2000.
40. S. Amoruso,X. Wang, C. Altucci, C. de Lisio, M. Armenante, R. Bruzzese, and R. Veletta, "Thermal and nonthermal ion emission during high-fluence femtosecond laser ablation of metallic targets", Appl. Phys. Lett. 77, pp. 3728-3730, 2000.
41. T. Y. Choi, D.J. Hwang, C. P. Grigoropoulos, "Femtosecond laser induced ablation of crystalline silicon upon double beam irradiation", Appl. Surf. Sci. 197-198, pp. 720-725, 2002.
42. R. Stoian, A. Mermillod-Blondin, A. Rosenfeld, I. V. Hertel, M. Spyridaki, E. Koudoumas, P. Tzanetakis, C. Fotakis, and N. M. Bulgakova, in preparation.
43. A. Bartelt, Ph.D. Thesis Freie Universität Berlin (2002).
44. A. Hache, Y. Kostoulas, R. Atanasov, J. L. P. Hughes, J. E. Sipe, and H. M. van Driel, "Observation of Coherently Controlled Photocurrent in Unbiased, Bulk GaAs", Phys. Rev. Lett. 78, pp. 306-309, 1997.
45. G. E. Jellison and D. H. Lowndes, "Measurements of the optical properties of liquid silicon and germanium using nanosecond time-resolved ellipsometry", Appl. Phys. Lett. 51, pp. 352-354, 1987.