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Volumn 286, Issue SPEC. ISS., 2005, Pages 442-445
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Correlation between growth stress and microstructure in CoCrPt alloy thin film with nanogranular structure
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Author keywords
CoCrPt alloy film; Film stress; Microstructural change
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Indexed keywords
COCRPT ALLOY FILM;
FILM STRESS;
MICROSTRUCTURAL CHANGE;
NANOGRANULAR STRUCTURE;
COBALT COMPOUNDS;
DEPOSITION;
GRANULAR MATERIALS;
MICROSTRUCTURE;
STRESS ANALYSIS;
ULTRAHIGH VACUUM;
THIN FILMS;
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EID: 11444249689
PISSN: 03048853
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jmmm.2004.09.062 Document Type: Conference Paper |
Times cited : (4)
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References (20)
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