|
Volumn 450, Issue 1, 2004, Pages 23-28
|
Recent advances in characterization of ultra-thin films using specular X-ray reflectivity technique
a b c d
b
LABORATORIO MDM
(Italy)
|
Author keywords
Surface and interfaces; Ultra thin films; X ray reflectivity
|
Indexed keywords
CARRIER CONCENTRATION;
CHEMICAL VAPOR DEPOSITION;
DATA REDUCTION;
FOURIER TRANSFORMS;
LASER BEAMS;
MASS SPECTROMETRY;
NITRIDES;
SURFACE ROUGHNESS;
THICKNESS MEASUREMENT;
VECTORS;
X RAY ANALYSIS;
SURFACE AND INTERFACES;
ULTRA-THIN FILMS;
X RAY REFLECTIVITY;
THIN FILMS;
|
EID: 1142267515
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2003.10.042 Document Type: Conference Paper |
Times cited : (26)
|
References (18)
|