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Volumn 450, Issue 1, 2004, Pages 23-28

Recent advances in characterization of ultra-thin films using specular X-ray reflectivity technique

Author keywords

Surface and interfaces; Ultra thin films; X ray reflectivity

Indexed keywords

CARRIER CONCENTRATION; CHEMICAL VAPOR DEPOSITION; DATA REDUCTION; FOURIER TRANSFORMS; LASER BEAMS; MASS SPECTROMETRY; NITRIDES; SURFACE ROUGHNESS; THICKNESS MEASUREMENT; VECTORS; X RAY ANALYSIS;

EID: 1142267515     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.10.042     Document Type: Conference Paper
Times cited : (26)

References (18)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.