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Volumn 426, Issue , 1996, Pages 497-502
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Growth of surface textured aluminum doped ZnO films for a-Si solar cells by RF magnetron sputtering at low temperature
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Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHOUS SILICON;
FILM GROWTH;
MAGNETRON SPUTTERING;
MORPHOLOGY;
SEMICONDUCTOR DOPING;
SOLAR CELLS;
SPUTTER DEPOSITION;
SURFACE STRUCTURE;
THERMAL EFFECTS;
THIN FILM DEVICES;
TRANSPARENCY;
ZINC OXIDE;
TEXTURED ALUMINUM DOPED ZINC OXIDE FILMS;
TRANSPARENT CONDUCTING OXIDE FILMS;
SEMICONDUCTING FILMS;
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EID: 0030420259
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-426-497 Document Type: Conference Paper |
Times cited : (36)
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References (9)
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