Growth of surface textured aluminum doped ZnO films for a-Si solar cells by RF magnetron sputtering at low temperature

Materials Research Society Symposium - Proceedings

Volumn 426, Issue , 1996, Pages 497-502

  Selvan, J A Anna ^a   Keppner, H ^a   Shah, A ^a  

^a Institute of Microtechnology   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; FILM GROWTH; MAGNETRON SPUTTERING; MORPHOLOGY; SEMICONDUCTOR DOPING; SOLAR CELLS; SPUTTER DEPOSITION; SURFACE STRUCTURE; THERMAL EFFECTS; THIN FILM DEVICES; TRANSPARENCY; ZINC OXIDE;

TEXTURED ALUMINUM DOPED ZINC OXIDE FILMS; TRANSPARENT CONDUCTING OXIDE FILMS;

SEMICONDUCTING FILMS;

EID: 0030420259     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-426-497     Document Type: Conference Paper

References (9)