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Volumn 85, Issue 20, 2004, Pages 4669-4671
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Silicon doping dependence of highly conductive n-type Al 0.7Ga 0.3N
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Author keywords
[No Author keywords available]
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Indexed keywords
CONCENTRATION PROFILES;
EFFECTIVE MASS;
FLOW RATE;
VARIABLES;
ACTIVATION ENERGY;
CARRIER CONCENTRATION;
DOPING (ADDITIVES);
ELECTRIC CONDUCTIVITY;
ENERGY GAP;
METALLORGANIC CHEMICAL VAPOR DEPOSITION;
SUBSTRATES;
X RAY DIFFRACTION;
SEMICONDUCTING ALUMINUM COMPOUNDS;
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EID: 10944240550
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1825055 Document Type: Article |
Times cited : (51)
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References (15)
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