Porosity control in zig-zag vapor-deposited films

Thin Solid Films

Volumn 471, Issue 1-2, 2005, Pages 1-11

  Yang, Y G ^a   Mass, D D ^a   Wadley, H N G ^a  

^a University of Virginia   (United States)

Author keywords

Deposition process; Growth mechanism; Surface diffusion; Surface morphology

Indexed keywords

COMPUTER SIMULATION; COSINE TRANSFORMS; DIFFUSION; HEAT RESISTANCE; MICROSTRUCTURE; MONTE CARLO METHODS; MORPHOLOGY; PORE SIZE; POROSITY; THERMAL CYCLING; THERMAL EXPANSION; VAPOR DEPOSITION; VOLUME FRACTION;

DEPOSITION PROCESS; GROWTH MECHANISM; KINETIC MONTE CARLO (KMC) METHOD; SURFACE DIFFUSION;

FILM GROWTH;

EID: 10644259782     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.02.034     Document Type: Article

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