High-precision system for automatic null ellipsometric measurement

Applied Optics

Volumn 41, Issue 22, 2002, Pages 4536-4540

  Zhu, Henian ^a,b   Liu, Liguo ^a,b   Wen, Yiwu ^c   Lü, Zhengde ^a,b   Zhang, Baizhe ^a,b  

^a TSINGHUA UNIVERSITY   (China)

^b Department of Physics ^*  (China)

^c Beijing Measuring and Cutting Tool Plant   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ELLIPSOMETRY; GLASS; LIGHT MODULATORS; LIGHT POLARIZATION; PHOTOELECTRICITY; PRECISION ENGINEERING;

AUTOMATIC NULL SYSTEMS;

MAGNETOOPTICAL DEVICES;

EID: 0036685387     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.41.004536     Document Type: Article

References (4)

1. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (Elsevier Science B.V., Amsterdam, 1987), pp. 255-265.
2. H. Reisinger, “Minimization of errors in ellipsometric measurements,” Solid-State Electron. 35, 333-344 (1992).
3. J. M. Bennett and H. E. Bennett, “Polarization,” in Handbook of Optics, W. G. Driscoll and W. Vaughn, eds. (McGraw-Hill, New York, 1978), Chap. 10, p. 120.
4. H. Zhu etc., “A new rhomb-type X./4 retarder,” Laser Infrared 30, 247-249 (2000).