Impact of high-k plug on self-heating effects of SOI MOSFETs

IEEE Transactions on Electron Devices

Volumn 51, Issue 12, 2004, Pages 2249-2251

  Komiya, Kenji ^a   Kawamoto, Toshitaka ^a   Sato, Shingo ^a   Omura, Yasuhisa ^a  

^a KANSAI UNIVERSITY   (Japan)

Author keywords

Buried insulator; Heat flow; MOSFET; SOI; Thermal conductivity

Indexed keywords

COMPUTER SIMULATION; MATHEMATICAL MODELS; SEMICONDUCTOR DEVICE STRUCTURES; SILICA; SILICON ON INSULATOR TECHNOLOGY; THERMAL CONDUCTIVITY; THERMAL EFFECTS; THERMAL INSULATING MATERIALS;

BURIED INSULATOR; HEAT FLOW; SELF HEATING EFFECTS;

MOSFET DEVICES;

EID: 10644239188     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2004.839874     Document Type: Article

References (7)

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