Thermal Analysis of Ultra-Thin Body Device Scaling

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 2003, Pages 883-886

  Pop, Eric ^a   Dutton, Robert ^a   Goodson, Kenneth ^a  

^a Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIASING TECHNIQUES; ISOTHERMAL SCALING; ULTRA-THIN BODY (UTB);

DISPERSION (WAVES); ELECTROSTATICS; EPITAXIAL GROWTH; HEAT CONDUCTION; HEAT PROBLEMS; HEAT RESISTANCE; NANOSTRUCTURED MATERIALS; PHONONS; SCATTERING; SEMICONDUCTOR DEVICE MODELS; SILICON ON INSULATOR TECHNOLOGY; SPECIFIC HEAT OF SOLIDS; THERMAL CONDUCTIVITY OF SOLIDS; THERMAL EFFECTS; THIN FILM TRANSISTORS; ULTRATHIN FILMS;

GATES (TRANSISTOR);

EID: 0842309721     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (20)

1. B. Yu et al, Proc. IEDM, p. 251, 2002
2. M. Ieong et al, Proc. ISQED, p. 492, 2002
3. L. Su et al, IEEE TED, vol. 41, p. 69, 1994
4. H.-S.P. Wong et al, Proc. IEDM, p. 407, 1998
5. G. Pei et al, IEEE TED, vol. 49, p. 1411, 2002
6. L. Chang et al, IEEE TED, vol. 49, p. 2288, 2002
7. E. Pop et al, Proc. IEDM, p. 677, 2001
8. P. Sverdrup et al, J. Heat Transfer, vol. 123, p. 130, 2001
9. J.M. Ziman, Electrons and Phonons, Oxford Press, 1960
10. Y.S. Ju and K.E. Goodson, Appl. Phys. Let., vol. 74, p. 3005, 1999
11. M. Asheghi et al, J. Appl. Phys., vol. 91, p. 5079, 2002
12. S.-M. Lee et al, J. Appl. Phys., vol. 81, p. 2590, 1997
13. T. Yamane et al, J. Appl. Phys., vol. 91, p. 9772, 2002
14. E.T. Swartz and R.O. Pohl, Rev. Mod. Phys., vol. 61, p. 605
15. K.E. Goodson et al, IEEE TCPMT, vol. 15, p. 715, 1992
16. A. Akturk et al, Proc. SISPAD, p. 311, 2003
17. E. Pop et al, Proc. SISPAD, p. 121, 2003
18. ITRS Roadmap [Online] http://public.itrs.net
19. J. Kedzierski et al, IEEE TED vol. 50, p. 952, 2003
20. M. Lundstrom and Z. Ren, IEEE TED, vol. 49, p. 133, 2002