Calculation and experimental verification of the acoustic stress at GHZ frequencies in SAW resonators

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 51, Issue 11, 2004, Pages 1437-1448

  Kubat, Franz ^a,c   Ruile, Werner ^a   Hesjedal, Thorsten ^b   Stotz, James ^b   Rösler, Ulrike ^a   Reindl, Leonhard M ^c  

^a EPCOS AG   (Germany)

^b PAUL DRUDE INSTITUT FÜR FESTKÖRPERELEKTRONIK   (Germany)

^c UNIVERSITY OF FREIBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; KINETIC ENERGY; MATRIX ALGEBRA; NATURAL FREQUENCIES; RESONATORS; SCANNING ELECTRON MICROSCOPY; STRESS ANALYSIS;

ACOUSTOMIGRATION; METAL ELECTRODES; PARTIAL WAVE METHOD (PWM); POTENTIAL POWER;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 10444245808     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2004.1367484     Document Type: Article

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