High power-durable RF-band SAW filters using single-crystal Al/Ti electrodes grown on 64°Y-X LiNbO3 substrates

Electronics Letters

Volumn 34, Issue 1, 1998, Pages 131-132

  Kimura, N ^a   Nakano, M ^a   Sato, K ^a  

^a TDK CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ELECTRODES; ELECTRON BEAMS; FILM GROWTH; LITHIUM COMPOUNDS; SINGLE CRYSTALS; SUBSTRATES; TITANIUM; VAPOR DEPOSITION;

ELECTRON BEAM VAPOR DEPOSITION TECHNIQUE;

ACOUSTIC SURFACE WAVE FILTERS;

EID: 0032495312     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:19980105     Document Type: Article

References (7)

1. LATHAM, J.I., SHREVE, W.R., TOLAR, N.J., and GHATE, P.B.: 'Improved metallisation for surface acoustic wave devices', Thin Solid Films, 1979, 64, pp. 9-15
2. KIMURA, N., NAKANO, M., and SATO, K.: 'Power durability of thin film electrodes for RF band SAW filters'. Proc. 2nd World Congress on Ultrasonics, 1997, pp. 358-359
3. SAKURAI, A., KIMURA, K., IEKI, H., and KASANAMI, T.: 'Epitaxially grown Al electrodes for high-power surface acoustic wave devices', Jpn. J. Appl. Phys., 1992, 31, pp. 3064-3066
4. SAKURAI, A., YOSHINO, Y., and IEKI, H.: 'Epitaxially grown Aluminum film on 36°-rotated Y-cut lithium tantalate for high-power surface acoustic wave devices', Jpn. J. Appl. Phys., 1994, 33, pp. 3015-3017
5. SAKURAI, A., NAKANISHI, H., and YOSHINO, Y.: 'Epitaxially grown Aluminum film on rotated Y-cut lithium niobate for high-power surface acoustic wave devices', Jpn. J. Appl. Phys., 1995, 34, pp. 2674-2677
6. MORITA, T., WATANABE, Y., TANAKA, M., and NAKAZAWA, Y.: 'Wideband low loss double mode SAW filters'. Proc. IEEE Ultrasonics Symp., 1992, pp. 95-104
7. KIMURA, N., NAKANO, M., NAKAZAWA, M., and SATO, K.: 'The power durability of 900MHz band double-mode-type surface acoustic wave filters and improvement in power durability of Al-Cu thin film electrodes by Cu atom segregation', Jpn. J. Appl. Phys., 1997, 36, pp. 3101-3106