Power durability of highly textured Al electrode in surface acoustic wave devices

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 35, Issue 5 SUPPL. B, 1996, Pages 2983-2986

  Matsukura, Noritsugu ^a   Kamijo, Atsushi ^a   Ootsuka, Eiichi ^a   Takahashi, Yoshihiro ^a   Sakairi, Natsuhiko ^a   Yamamoto, Yasushi ^a  

^a NEC CORPORATION   (Japan)

Author keywords

Highly textured Al; IIDT filter; Ion beam sputtering; Power durability; Surface acoustic wave; Underlayers

Indexed keywords

ALUMINUM; DURABILITY; ELECTRODES; ION BEAMS; POWER CONTROL; SPUTTERING; WAVE FILTERS;

HIGHLY-TEXTURED ALUMINUM; ION-BEAM SPUTTERING; POWER DURABILITY; SURFACE ACOUSTIC WAVE; UNDERLAYERS;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 0030149820     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.35.2983     Document Type: Article

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