Investigation of SAW-induced acoustomigration effects in Cu- and Al-based metallizations

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 2001, Pages 97-100

  Schmidt, H ^a,b   Menzel, S ^b   Weihnacht, M ^b   Kunze, R ^a,b  

^a Vectron International Telefilter   (Germany)

^b IFW DRESDEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC FIELDS; ACOUSTIC WAVE EFFECTS; ACOUSTIC WAVE REFLECTION; ACOUSTIC WAVE VELOCITY; ALUMINUM ALLOYS; COPPER ALLOYS; ELECTRODES; LITHIUM NIOBATE; MATHEMATICAL MODELS; METALLIZING; OPTICAL MICROSCOPY; QUARTZ;

ACOUSTOMIGRATION EFFECTS; FOCUSED ION BEAM TECHNIQUE;

ACOUSTIC SURFACE WAVE FILTERS;

EID: 0035729740     PISSN: 10510117     EISSN: None     Source Type: Journal    
DOI: 10.1109/ULTSYM.2001.991587     Document Type: Article

References (4)

1. High power-durable and low-loss single-crystalline Al/Ti electrodes for RF SAW devices
2. A novel test device to characterize SAW acoustomigration
3. In situ SEM investigations of stress induced migration in SAW structures
4. Damaging of metallization layers by high power surface acoustic wave fields