In-situ study of acoustomigration by scanning Acoustic Force Microscopy

Proceedings of the IEEE Ultrasonics Symposium

Volumn 2, Issue , 2003, Pages 1483-1486

  Hesjedal, T ^a   Kubat, F ^b   Mohanty, J ^a   Ruile, W ^c   Reindl, L ^b  

^a PAUL DRUDE INSTITUT FÜR FESTKÖRPERELEKTRONIK   (Germany)

^b CLAUSTHAL UNIVERSITY OF TECHNOLOGY   (Germany)

^c EPCOS AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC MICROSCOPES; ACOUSTIC RESONATORS; ACOUSTIC TRANSDUCERS; ACOUSTIC WAVES; ELECTRODES; GRANULAR MATERIALS; LITHIUM COMPOUNDS; MICROSCOPIC EXAMINATION; STRESS ANALYSIS; SURFACE TOPOGRAPHY;

ACOUSTOMIGRATION; METAL STRUCTURES; SCANNING ACOUSTIC FORCE MICROSCOPY (SAFM); SUBMICRON LATERAL RESOLUTION;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 4143066170     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

1. D. Bell, "Aging Processes in SAW Resonators", IEEE Ultrason. Symp. Proc., pp. 851-856, 1977; W.R. Shreve, "Aging in Quartz SAW Resonators", IEEE Ultrason. Symp. Proc., pp. 857-861, 1977.
2. D. Bell, "Aging Processes in SAW Resonators", IEEE Ultrason. Symp. Proc., pp. 851-856, 1977; W.R. Shreve, "Aging in Quartz SAW Resonators", IEEE Ultrason. Symp. Proc., pp. 857-861, 1977.
3. W.R. Shreve, R.C. Bray, S. Elliott, Y.C. Chu, "Power Dependence of Aging in SAW Resonators", IEEE Ultrason. Symp. Proc., pp. 94-97, 1981.
4. J.I. Latham, W.R. Shreve, N.J. Tolar, P.B. Ghate, "Improved Metallization for Surface Acoustic Wave Devices", Thin Solid Films, vol. 64, pp. 9-15, 1979.
5. W. Ruile, G. Raml, A. Springer, R. Weigel, "A Novel Test Device to Characterize SAW Acoustomigration", IEEE Ultrason. Symp. Proc., pp. 275-278, 2000.
6. G. Raml, W. Ruile, A. Springer, R. Weigel, "Characterization of Acoustomigration with On-Waver Measurement System", IEEE Ultrason. Symp. Proc., pp. 153-156, 2001.
7. 3", IEEE Ultrason. Symp. Proc., 2003.
8. T. Hesjedal and G. Behme, "Study of Elementary Surface Acoustic Wave Phenomena", Europhys. Lett., vol. 54, pp. 154-160, 2001.
9. T. Hesjedal and G. Behme, "Investigation of single surface acoustic wave sources", Electronic Lett., vol. 36, pp. 1903-1904, 2000.