Power and reliability improvement of an electro-thermal microactuator using Ni-diamond nanocomposite

Proceedings - Electronic Components and Technology Conference

Volumn 1, Issue , 2004, Pages 472-476

  Tsai, Li Nuan ^a   Shen, Guang Ren ^a   Cheng, Y T ^a   Hsu, Wensyang ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER BEAMS; ELECTRODEPOSITION; LOW TEMPERATURE EFFECTS; NANOSTRUCTURED MATERIALS; PRODUCT DESIGN; STRESS ANALYSIS;

NANODIAMONDS; OPERATING TEMPERATURE; SEED LAYERS; THERMAL MICROACTUATORS;

MICROACTUATORS;

EID: 10444236407     PISSN: 05695503     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

1. Linder, L. Paratte, M. A. Gretillat, V. P. Jaeckin and de N. F. Rooij, "Surface Micromachining", J. Micromech. Microeng., vol. 2, pp. 122-132, 1992.
2. M. E. McNie, R. R. Davies, N. Price, D. O. King, and K. M. Brunson, "Advanced micromechanical prototyping in polysilicon and SOI", IEEE, 2000.
3. Hsu, C. and Hsu, W., "Electrothermally-driven long stretch micro drive with monolithic cascaded actuation units in compact arrangement," Transducers'03, Boston, USA, June &-12, 2003.
4. H. Guckel, J. Klein, T. Christenson, K. Skrobis, M. London, and E. G. Lovell,Thermo-Magnetic Metal Flexure Actuators Technical Digest, IEEE Solid State Sensor and Actuator Workshop, pp.73-75, 1992.
5. H. C. Nathanson, R. A. Wickstrom, "A Resonant-Gate Silicon Surface Transistor With High-Q Band-Pass Properties", App. Phys. Letters, vol. 7, No. 4, pp. 84-86, 15 Aug. 1965.
6. Long Que, Lisa Otradovec, Andrew D.Oliver, and Yogesh B.Gianchandani, "Pulse and DC Operation Lifetimes of Bent-Beam Electrothermal Actuators",. The 14th IEEE International Conference on Micro Electro Mechanical Systems, pp. 570-573, Jan 2001.
7. L. Que, Park, J. S., and Gianchandani, Y. B., "Bent-beam electrothermal actuators - part 1: single beam and cascaded devices," J. Microelectromechanical systems, vol. 10, no. 2, pp-247-254, 2001.
8. K. S., Y. T. Cheng, and L. W. Lin, "Nickel Nano-Composite Film For MEMS Applications", The 12th International Conference on Solid State Sensors, Actuators and Microsystems, Boston, June 8-12, pp. 1534-1537, 2003
9. C. S. Pan and Wen Syang Hsu, "An Electro-thermally and Laterally Driven Polysilicon Microactuator", J. Micromech. and Microeng., vol. 7, pp.7-13, 1997.
10. S. Timoshenko, D. H. Young, W. Weaver, Jr., Vibration Problems in Engineering, 4th Ed. New York: John Wiley and Sons, 1974.