Electrothermally-driven long stretch micro drive with monolithic cascaded actuation units in compact arrangement

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 348-351

  Hsu, Chen Peng ^a   Liao, Tingsin ^a   Hsu, Wensyang ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

Drives; Electrothermal effects; Fabrication; Force sensors; Intelligent actuators; Intelligent sensors; Microactuators; Micromechanical devices; Optical sensors; Voltage

Indexed keywords

ACTUATORS; CASCADE CONTROL SYSTEMS; DRIVES; ELECTRIC POTENTIAL; FABRICATION; MICROACTUATORS; MICROSYSTEMS; OPTICAL SENSORS; TRANSDUCERS;

ELECTRO-THERMAL EFFECTS; FORCE SENSOR; INTELLIGENT ACTUATOR; INTELLIGENT SENSORS; MICROMECHANICAL DEVICE;

SOLID-STATE SENSORS;

EID: 84944753765     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215324     Document Type: Conference Paper

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