The effects of membrane metallization in capacitive microfabricated ultrasonic transducers

Journal of the Acoustical Society of America

Volumn 115, Issue 2, 2004, Pages 651-657

  Caronti, Alessandro ^a   Carotenuto, Riccardo ^a   Caliano, Giosuè ^a   Pappalardo, Massimo ^a  

^a ROMA TRE UNIVERSITY   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRODES; ELECTROSTATICS; FINITE ELEMENT METHOD; METALLIZING; OPTIMIZATION;

CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS (CMUT); COLLAPSE VOLTAGE;

ULTRASONIC TRANSDUCERS;

ACOUSTIC TECHNIQUE;

ARTICLE; DEVICE; ELECTRIC POTENTIAL; ELECTRICITY; ELECTRODE; FINITE ELEMENT ANALYSIS; GEOMETRY; MOLECULAR DYNAMICS; PRIORITY JOURNAL; SIMULATION; THICKNESS; ULTRASOUND TRANSDUCER;

EID: 1042276667     PISSN: 00014966     EISSN: None     Source Type: Journal    
DOI: 10.1121/1.1642622     Document Type: Article

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