Coating of SiC surface by thin carbon films using the carbide-derived carbon process

Thin Solid Films

Volumn 469-470, Issue SPEC. ISS., 2004, Pages 135-141

  Zinovev, A V ^a   Elam, J W ^a   Moore, J F ^a   Hryn, J N ^a   Auciello, O ^a   Carlisle, J A ^a   Pellin, M J ^a  

^a ARGONNE NATIONAL LABORATORY   (United States)

Author keywords

Carbide derived carbon; SiC surface; Thin carbon films

Indexed keywords

CERAMIC MATERIALS; CRYSTAL ORIENTATION; ETCHING; FILM GROWTH; GRAIN SIZE AND SHAPE; MASS SPECTROMETRY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYCRYSTALLINE MATERIALS; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SILICON CARBIDE; THERMODYNAMIC PROPERTIES; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBIDE-DERIVED CARBON; OXYCARBIDES; SIC SURFACE; THIN CARBON FILMS;

THIN FILMS;

EID: 10044283000     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.08.165     Document Type: Article

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