Design and performance evaluation of a 3-DOF mobile microrobot for micromanipulation

KSME International Journal

Volumn 17, Issue 9, 2003, Pages 1268-1275

  Park, Jungyul ^a   Kim, Deok Ho ^a   Kim, Byungkyu ^a   Kim, Taesung ^b   Lee, Kyo Il ^c  

^a Korea Institute of Science and Technology   (South Korea)

^b UNIVERSITY OF MICHIGAN   (United States)

^c Seoul National University   (South Korea)

Author keywords

Impact Actuating Mechanism; Micromanipulation; Microrobot; Modeling; Piezoelectric

Indexed keywords

ACTUATORS; COSTS; FRICTION; MICROMANIPULATORS; PIEZOELECTRIC DEVICES; PRODUCT DESIGN; VOLTAGE CONTROL;

IMPACT ACTUATING MECHANISM; MICROMANIPULATION; MICROROBOTS; PIEZOELECTRIC;

MOBILE ROBOTS;

EID: 10044278789     PISSN: 12264865     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02982468     Document Type: Article

References (14)

1. Adriaens, H., et al., 2000, "Modeling Piezoelectric Actuators, " IEEE/ASME Transactions on Mechatronics, Vol. 5, No. 4, pp. 331-341.
2. Fahlbusch, S. and Fatikow, S., 2001, "Implementaton of Self-Sensing SPM Cantilevers for Nano-Force Measurement in Microrobotics," Ultramicroscopy, Vol. 86, pp. 181-190.
3. Higuchi, T., et al., 1990, "Precise Positioning Mechanism Utilizing rapid Deformations of Piezoelectric Elements," Micro Electro Mechanical Systems, Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE, pp. 222-226.
4. Juhas, L., et al., 2000, "Development of Platform for Micro-Positioning Actuated by Piezo-Legs," Proceedings of the 2000 IEEE International Conference on Robotics & Automation, San Francisco, CA, pp. 3647-3653.
5. Kim, D. H., et al., 2002, "Implementation of Self-Sensing MEMS Cantilevers for Nanomanipulation," Proc. the 4th Korean MEMS conference, pp. 120-125.
6. Lee, J. K., et al., 1999, "Piezoelectric Smart Structures for Noise Reduction in a Cabin," KSME International Journal, Vol. 13, No. 6, pp. 451-458.
7. Martel, S., et al., 1999, "NanoWalker : A Fully Autonomous Highly Integrated Miniature Robot for Nano-Scale Measuremtents," Proceedings of the European Optical Society (EOS) and SPIE International Symposium on Enviosense, Microsystems Metrology and Inspection, Vol. 3825, Munich, Germany 12 pages.
8. Mendes, J., et al., 1996, "Printed Board Positioning System Using Impact Drive Mechanism," SICE, Tottori, pp 1123-1128.
9. Michael, G. and Nikola, C., 1997, "Modeling Piezoelectric Stack Actuators for Control of Micromanipulation," IEEE Control Systems Magazine, Vol. 17, No. 3. pp. 69-79.
10. Nam, Y. S. and Sasaki, M., 2002, "Strain Rate Self-Sensing for a Cantilevered Piezoelectric Beam," KSME International Journal, Vol. 16, No. 3, pp. 310-319.
11. Oh, J. E., et al., 2000, "Active Vibration Control of Flexible Cantilever Beam Using Piezo Actuator and Filtered-X LMS Algorithm," KSME International Journal, Vol. 12, No. 4, pp. 665-671.
12. Sheppard, C. J. R., 1997, Confocal Laser Scanning Microscopy, Springer.
13. Shim, J. Y. and Gweon, D. G., 2001, "Piezo-Driven Metrological Multiaxis Nanopositoner," Review of Science Instruments, Vol. 72, No. 11, pp. 4183-4187.
14. Yamagata, Y. and Higuchi, T., 1995, "A Micropositioning Device for Precision Automatic Assembly Using Impact Force of Piezoelectric Elements, " IEEE International Conference on Robotics and Automation, Nagoya, Aichi, Japan, pp. 666-671.